JPS5340229B2 - - Google Patents
Info
- Publication number
- JPS5340229B2 JPS5340229B2 JP502275A JP502275A JPS5340229B2 JP S5340229 B2 JPS5340229 B2 JP S5340229B2 JP 502275 A JP502275 A JP 502275A JP 502275 A JP502275 A JP 502275A JP S5340229 B2 JPS5340229 B2 JP S5340229B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP502275A JPS5180371A (ja) | 1975-01-10 | 1975-01-10 | Shinkujochakuhoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP502275A JPS5180371A (ja) | 1975-01-10 | 1975-01-10 | Shinkujochakuhoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5180371A JPS5180371A (ja) | 1976-07-13 |
| JPS5340229B2 true JPS5340229B2 (enExample) | 1978-10-26 |
Family
ID=11599871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP502275A Granted JPS5180371A (ja) | 1975-01-10 | 1975-01-10 | Shinkujochakuhoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5180371A (enExample) |
-
1975
- 1975-01-10 JP JP502275A patent/JPS5180371A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5180371A (ja) | 1976-07-13 |