JPS5340191B2 - - Google Patents
Info
- Publication number
- JPS5340191B2 JPS5340191B2 JP10492674A JP10492674A JPS5340191B2 JP S5340191 B2 JPS5340191 B2 JP S5340191B2 JP 10492674 A JP10492674 A JP 10492674A JP 10492674 A JP10492674 A JP 10492674A JP S5340191 B2 JPS5340191 B2 JP S5340191B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10492674A JPS5132490A (en) | 1974-09-13 | 1974-09-13 | SUPATSUTA SOCHI |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10492674A JPS5132490A (en) | 1974-09-13 | 1974-09-13 | SUPATSUTA SOCHI |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5132490A JPS5132490A (en) | 1976-03-19 |
| JPS5340191B2 true JPS5340191B2 (en) | 1978-10-25 |
Family
ID=14393693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10492674A Granted JPS5132490A (en) | 1974-09-13 | 1974-09-13 | SUPATSUTA SOCHI |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5132490A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546760Y2 (en) * | 1976-08-26 | 1980-11-01 | ||
| JPS5816078A (en) * | 1981-07-17 | 1983-01-29 | Toshiba Corp | Plasma etching device |
| JP2656544B2 (en) * | 1988-05-31 | 1997-09-24 | 株式会社日立製作所 | Vacuum processing equipment |
-
1974
- 1974-09-13 JP JP10492674A patent/JPS5132490A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5132490A (en) | 1976-03-19 |