JPS5339853A - Method of adjusting distribution of dopant density in doping irradiated by thermal neutron - Google Patents

Method of adjusting distribution of dopant density in doping irradiated by thermal neutron

Info

Publication number
JPS5339853A
JPS5339853A JP11497976A JP11497976A JPS5339853A JP S5339853 A JPS5339853 A JP S5339853A JP 11497976 A JP11497976 A JP 11497976A JP 11497976 A JP11497976 A JP 11497976A JP S5339853 A JPS5339853 A JP S5339853A
Authority
JP
Japan
Prior art keywords
doping
irradiated
thermal neutron
dopant density
adjusting distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11497976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577600B2 (enExample
Inventor
Atsushi Yusa
Yoshifumi Yatsurugi
Tetsuo Takaishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP11497976A priority Critical patent/JPS5339853A/ja
Publication of JPS5339853A publication Critical patent/JPS5339853A/ja
Publication of JPS577600B2 publication Critical patent/JPS577600B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Measurement Of Radiation (AREA)
JP11497976A 1976-09-24 1976-09-24 Method of adjusting distribution of dopant density in doping irradiated by thermal neutron Granted JPS5339853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11497976A JPS5339853A (en) 1976-09-24 1976-09-24 Method of adjusting distribution of dopant density in doping irradiated by thermal neutron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11497976A JPS5339853A (en) 1976-09-24 1976-09-24 Method of adjusting distribution of dopant density in doping irradiated by thermal neutron

Publications (2)

Publication Number Publication Date
JPS5339853A true JPS5339853A (en) 1978-04-12
JPS577600B2 JPS577600B2 (enExample) 1982-02-12

Family

ID=14651343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11497976A Granted JPS5339853A (en) 1976-09-24 1976-09-24 Method of adjusting distribution of dopant density in doping irradiated by thermal neutron

Country Status (1)

Country Link
JP (1) JPS5339853A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009133854A (ja) * 2007-11-28 2009-06-18 Ge-Hitachi Nuclear Energy Americas Llc 断面積を低減した同位体システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009133854A (ja) * 2007-11-28 2009-06-18 Ge-Hitachi Nuclear Energy Americas Llc 断面積を低減した同位体システム

Also Published As

Publication number Publication date
JPS577600B2 (enExample) 1982-02-12

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