JPS5339785A - Apparatus for inspecting cross section of single crystal line plate - Google Patents

Apparatus for inspecting cross section of single crystal line plate

Info

Publication number
JPS5339785A
JPS5339785A JP11363176A JP11363176A JPS5339785A JP S5339785 A JPS5339785 A JP S5339785A JP 11363176 A JP11363176 A JP 11363176A JP 11363176 A JP11363176 A JP 11363176A JP S5339785 A JPS5339785 A JP S5339785A
Authority
JP
Japan
Prior art keywords
section
single crystal
line plate
crystal line
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11363176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5415512B2 (cs
Inventor
Toshio Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Original Assignee
Rigaku Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd filed Critical Rigaku Denki Co Ltd
Priority to JP11363176A priority Critical patent/JPS5339785A/ja
Publication of JPS5339785A publication Critical patent/JPS5339785A/ja
Publication of JPS5415512B2 publication Critical patent/JPS5415512B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP11363176A 1976-09-24 1976-09-24 Apparatus for inspecting cross section of single crystal line plate Granted JPS5339785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11363176A JPS5339785A (en) 1976-09-24 1976-09-24 Apparatus for inspecting cross section of single crystal line plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11363176A JPS5339785A (en) 1976-09-24 1976-09-24 Apparatus for inspecting cross section of single crystal line plate

Publications (2)

Publication Number Publication Date
JPS5339785A true JPS5339785A (en) 1978-04-11
JPS5415512B2 JPS5415512B2 (cs) 1979-06-15

Family

ID=14617116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11363176A Granted JPS5339785A (en) 1976-09-24 1976-09-24 Apparatus for inspecting cross section of single crystal line plate

Country Status (1)

Country Link
JP (1) JPS5339785A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225339A (ja) * 1983-06-04 1984-12-18 Horiba Ltd 結晶面傾き角度測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225339A (ja) * 1983-06-04 1984-12-18 Horiba Ltd 結晶面傾き角度測定装置

Also Published As

Publication number Publication date
JPS5415512B2 (cs) 1979-06-15

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