JPS533976A - Process for surface treatment of substrate under vacuum - Google Patents

Process for surface treatment of substrate under vacuum

Info

Publication number
JPS533976A
JPS533976A JP7830176A JP7830176A JPS533976A JP S533976 A JPS533976 A JP S533976A JP 7830176 A JP7830176 A JP 7830176A JP 7830176 A JP7830176 A JP 7830176A JP S533976 A JPS533976 A JP S533976A
Authority
JP
Japan
Prior art keywords
under vacuum
surface treatment
substrate under
substrate
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7830176A
Other languages
Japanese (ja)
Inventor
Kenzou Souno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP7830176A priority Critical patent/JPS533976A/en
Publication of JPS533976A publication Critical patent/JPS533976A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7830176A 1976-06-30 1976-06-30 Process for surface treatment of substrate under vacuum Pending JPS533976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7830176A JPS533976A (en) 1976-06-30 1976-06-30 Process for surface treatment of substrate under vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7830176A JPS533976A (en) 1976-06-30 1976-06-30 Process for surface treatment of substrate under vacuum

Publications (1)

Publication Number Publication Date
JPS533976A true JPS533976A (en) 1978-01-14

Family

ID=13658090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7830176A Pending JPS533976A (en) 1976-06-30 1976-06-30 Process for surface treatment of substrate under vacuum

Country Status (1)

Country Link
JP (1) JPS533976A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798739A (en) * 1985-10-25 1989-01-17 Solems Plasma-assisted method for thin film fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798739A (en) * 1985-10-25 1989-01-17 Solems Plasma-assisted method for thin film fabrication

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