JPS5339751B2 - - Google Patents
Info
- Publication number
- JPS5339751B2 JPS5339751B2 JP13396776A JP13396776A JPS5339751B2 JP S5339751 B2 JPS5339751 B2 JP S5339751B2 JP 13396776 A JP13396776 A JP 13396776A JP 13396776 A JP13396776 A JP 13396776A JP S5339751 B2 JPS5339751 B2 JP S5339751B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13396776A JPS5358774A (en) | 1976-11-08 | 1976-11-08 | Position detecting method in electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13396776A JPS5358774A (en) | 1976-11-08 | 1976-11-08 | Position detecting method in electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5358774A JPS5358774A (en) | 1978-05-26 |
JPS5339751B2 true JPS5339751B2 (he) | 1978-10-23 |
Family
ID=15117259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13396776A Granted JPS5358774A (en) | 1976-11-08 | 1976-11-08 | Position detecting method in electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358774A (he) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57138820U (he) * | 1981-02-24 | 1982-08-30 |
-
1976
- 1976-11-08 JP JP13396776A patent/JPS5358774A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57138820U (he) * | 1981-02-24 | 1982-08-30 |
Also Published As
Publication number | Publication date |
---|---|
JPS5358774A (en) | 1978-05-26 |