JPS5339662B1 - - Google Patents

Info

Publication number
JPS5339662B1
JPS5339662B1 JP3462971A JP3462971A JPS5339662B1 JP S5339662 B1 JPS5339662 B1 JP S5339662B1 JP 3462971 A JP3462971 A JP 3462971A JP 3462971 A JP3462971 A JP 3462971A JP S5339662 B1 JPS5339662 B1 JP S5339662B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3462971A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3462971A priority Critical patent/JPS5339662B1/ja
Priority to US254902A priority patent/US3916034A/en
Publication of JPS5339662B1 publication Critical patent/JPS5339662B1/ja
Pending legal-status Critical Current

Links

JP3462971A 1971-05-21 1971-05-21 Pending JPS5339662B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3462971A JPS5339662B1 (en) 1971-05-21 1971-05-21
US254902A US3916034A (en) 1971-05-21 1972-05-19 Method of transporting substances in a plasma stream to and depositing it on a target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3462971A JPS5339662B1 (en) 1971-05-21 1971-05-21

Publications (1)

Publication Number Publication Date
JPS5339662B1 true JPS5339662B1 (en) 1978-10-23

Family

ID=12419676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3462971A Pending JPS5339662B1 (en) 1971-05-21 1971-05-21

Country Status (1)

Country Link
JP (1) JPS5339662B1 (en)

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