JPS5339626B2 - - Google Patents

Info

Publication number
JPS5339626B2
JPS5339626B2 JP4253474A JP4253474A JPS5339626B2 JP S5339626 B2 JPS5339626 B2 JP S5339626B2 JP 4253474 A JP4253474 A JP 4253474A JP 4253474 A JP4253474 A JP 4253474A JP S5339626 B2 JPS5339626 B2 JP S5339626B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4253474A
Other languages
Japanese (ja)
Other versions
JPS50134262A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4253474A priority Critical patent/JPS5339626B2/ja
Publication of JPS50134262A publication Critical patent/JPS50134262A/ja
Publication of JPS5339626B2 publication Critical patent/JPS5339626B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtration Of Liquid (AREA)
JP4253474A 1974-04-15 1974-04-15 Expired JPS5339626B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4253474A JPS5339626B2 (zh) 1974-04-15 1974-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4253474A JPS5339626B2 (zh) 1974-04-15 1974-04-15

Publications (2)

Publication Number Publication Date
JPS50134262A JPS50134262A (zh) 1975-10-24
JPS5339626B2 true JPS5339626B2 (zh) 1978-10-23

Family

ID=12638732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4253474A Expired JPS5339626B2 (zh) 1974-04-15 1974-04-15

Country Status (1)

Country Link
JP (1) JPS5339626B2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152145U (zh) * 1979-04-18 1980-11-01
KR20210018401A (ko) 2015-10-08 2021-02-17 미쓰비시 세이시 가부시키가이샤 레지스트층의 박막화 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642307U (zh) * 1979-09-05 1981-04-18

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4719981U (zh) * 1971-01-21 1972-11-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4719981U (zh) * 1971-01-21 1972-11-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152145U (zh) * 1979-04-18 1980-11-01
KR20210018401A (ko) 2015-10-08 2021-02-17 미쓰비시 세이시 가부시키가이샤 레지스트층의 박막화 장치

Also Published As

Publication number Publication date
JPS50134262A (zh) 1975-10-24

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