JPS5339317B2 - - Google Patents
Info
- Publication number
- JPS5339317B2 JPS5339317B2 JP10494975A JP10494975A JPS5339317B2 JP S5339317 B2 JPS5339317 B2 JP S5339317B2 JP 10494975 A JP10494975 A JP 10494975A JP 10494975 A JP10494975 A JP 10494975A JP S5339317 B2 JPS5339317 B2 JP S5339317B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50104949A JPS5229187A (en) | 1975-09-01 | 1975-09-01 | Method for production of polycrystalline semiconductor film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50104949A JPS5229187A (en) | 1975-09-01 | 1975-09-01 | Method for production of polycrystalline semiconductor film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5229187A JPS5229187A (en) | 1977-03-04 |
| JPS5339317B2 true JPS5339317B2 (ru) | 1978-10-20 |
Family
ID=14394338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50104949A Granted JPS5229187A (en) | 1975-09-01 | 1975-09-01 | Method for production of polycrystalline semiconductor film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5229187A (ru) |
-
1975
- 1975-09-01 JP JP50104949A patent/JPS5229187A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5229187A (en) | 1977-03-04 |