JPS5338471B2 - - Google Patents

Info

Publication number
JPS5338471B2
JPS5338471B2 JP8738373A JP8738373A JPS5338471B2 JP S5338471 B2 JPS5338471 B2 JP S5338471B2 JP 8738373 A JP8738373 A JP 8738373A JP 8738373 A JP8738373 A JP 8738373A JP S5338471 B2 JPS5338471 B2 JP S5338471B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8738373A
Other languages
Japanese (ja)
Other versions
JPS5037076A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8738373A priority Critical patent/JPS5338471B2/ja
Publication of JPS5037076A publication Critical patent/JPS5037076A/ja
Publication of JPS5338471B2 publication Critical patent/JPS5338471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Turning (AREA)
JP8738373A 1973-08-03 1973-08-03 Expired JPS5338471B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8738373A JPS5338471B2 (en:Method) 1973-08-03 1973-08-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8738373A JPS5338471B2 (en:Method) 1973-08-03 1973-08-03

Publications (2)

Publication Number Publication Date
JPS5037076A JPS5037076A (en:Method) 1975-04-07
JPS5338471B2 true JPS5338471B2 (en:Method) 1978-10-16

Family

ID=13913363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8738373A Expired JPS5338471B2 (en:Method) 1973-08-03 1973-08-03

Country Status (1)

Country Link
JP (1) JPS5338471B2 (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1206338A (en) * 1982-05-14 1986-06-24 Michael J. Sealey Machining workpieces
JPH0329084Y2 (en:Method) * 1986-05-09 1991-06-21
US6676717B1 (en) 1995-03-28 2004-01-13 Applied Materials Inc Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142932Y2 (en:Method) * 1971-09-28 1976-10-19

Also Published As

Publication number Publication date
JPS5037076A (en:Method) 1975-04-07

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