JPS5337713B2 - - Google Patents
Info
- Publication number
- JPS5337713B2 JPS5337713B2 JP13729176A JP13729176A JPS5337713B2 JP S5337713 B2 JPS5337713 B2 JP S5337713B2 JP 13729176 A JP13729176 A JP 13729176A JP 13729176 A JP13729176 A JP 13729176A JP S5337713 B2 JPS5337713 B2 JP S5337713B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13729176A JPS5362478A (en) | 1976-11-17 | 1976-11-17 | Soft x-ray transfer apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13729176A JPS5362478A (en) | 1976-11-17 | 1976-11-17 | Soft x-ray transfer apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362478A JPS5362478A (en) | 1978-06-03 |
| JPS5337713B2 true JPS5337713B2 (show.php) | 1978-10-11 |
Family
ID=15195240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13729176A Granted JPS5362478A (en) | 1976-11-17 | 1976-11-17 | Soft x-ray transfer apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362478A (show.php) |
-
1976
- 1976-11-17 JP JP13729176A patent/JPS5362478A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5362478A (en) | 1978-06-03 |