JPS5337216B2 - - Google Patents

Info

Publication number
JPS5337216B2
JPS5337216B2 JP11554675A JP11554675A JPS5337216B2 JP S5337216 B2 JPS5337216 B2 JP S5337216B2 JP 11554675 A JP11554675 A JP 11554675A JP 11554675 A JP11554675 A JP 11554675A JP S5337216 B2 JPS5337216 B2 JP S5337216B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11554675A
Other languages
Japanese (ja)
Other versions
JPS5240124A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11554675A priority Critical patent/JPS5240124A/ja
Publication of JPS5240124A publication Critical patent/JPS5240124A/ja
Publication of JPS5337216B2 publication Critical patent/JPS5337216B2/ja
Granted legal-status Critical Current

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  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP11554675A 1975-09-26 1975-09-26 Method for forming high energy beam resist Granted JPS5240124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11554675A JPS5240124A (en) 1975-09-26 1975-09-26 Method for forming high energy beam resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11554675A JPS5240124A (en) 1975-09-26 1975-09-26 Method for forming high energy beam resist

Publications (2)

Publication Number Publication Date
JPS5240124A JPS5240124A (en) 1977-03-28
JPS5337216B2 true JPS5337216B2 (cs) 1978-10-07

Family

ID=14665200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11554675A Granted JPS5240124A (en) 1975-09-26 1975-09-26 Method for forming high energy beam resist

Country Status (1)

Country Link
JP (1) JPS5240124A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5066565A (en) * 1989-03-29 1991-11-19 The United States Of America As Represented By The United States Department Of Energy Selective protection of poly(tetra-fluoroethylene) from effects of chemical etching
DE102006049759B4 (de) 2006-10-21 2018-08-09 Man Diesel & Turbo Se Kraftstoffpumpe

Also Published As

Publication number Publication date
JPS5240124A (en) 1977-03-28

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