JPS5336968U - - Google Patents
Info
- Publication number
- JPS5336968U JPS5336968U JP11908376U JP11908376U JPS5336968U JP S5336968 U JPS5336968 U JP S5336968U JP 11908376 U JP11908376 U JP 11908376U JP 11908376 U JP11908376 U JP 11908376U JP S5336968 U JPS5336968 U JP S5336968U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11908376U JPS5336968U (cs) | 1976-09-04 | 1976-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11908376U JPS5336968U (cs) | 1976-09-04 | 1976-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5336968U true JPS5336968U (cs) | 1978-03-31 |
Family
ID=28728611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11908376U Pending JPS5336968U (cs) | 1976-09-04 | 1976-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5336968U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55102816U (cs) * | 1979-01-13 | 1980-07-18 | ||
| KR20230122546A (ko) | 2022-02-14 | 2023-08-22 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
-
1976
- 1976-09-04 JP JP11908376U patent/JPS5336968U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55102816U (cs) * | 1979-01-13 | 1980-07-18 | ||
| KR20230122546A (ko) | 2022-02-14 | 2023-08-22 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |