JPS533584B2 - - Google Patents
Info
- Publication number
- JPS533584B2 JPS533584B2 JP6152474A JP6152474A JPS533584B2 JP S533584 B2 JPS533584 B2 JP S533584B2 JP 6152474 A JP6152474 A JP 6152474A JP 6152474 A JP6152474 A JP 6152474A JP S533584 B2 JPS533584 B2 JP S533584B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152474A JPS533584B2 (enExample) | 1974-05-31 | 1974-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152474A JPS533584B2 (enExample) | 1974-05-31 | 1974-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50155064A JPS50155064A (enExample) | 1975-12-13 |
| JPS533584B2 true JPS533584B2 (enExample) | 1978-02-08 |
Family
ID=13173560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6152474A Expired JPS533584B2 (enExample) | 1974-05-31 | 1974-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS533584B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019048298A (ja) * | 2018-11-30 | 2019-03-28 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理装置の配管洗浄方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5372379A (en) * | 1976-12-09 | 1978-06-27 | Kawasaki Steel Corp | Method of removing scale attached to the inside wall of water pipe |
| JPH028592U (enExample) * | 1988-06-30 | 1990-01-19 |
-
1974
- 1974-05-31 JP JP6152474A patent/JPS533584B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019048298A (ja) * | 2018-11-30 | 2019-03-28 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理装置の配管洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50155064A (enExample) | 1975-12-13 |