JPS533584B2 - - Google Patents

Info

Publication number
JPS533584B2
JPS533584B2 JP6152474A JP6152474A JPS533584B2 JP S533584 B2 JPS533584 B2 JP S533584B2 JP 6152474 A JP6152474 A JP 6152474A JP 6152474 A JP6152474 A JP 6152474A JP S533584 B2 JPS533584 B2 JP S533584B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6152474A
Other languages
Japanese (ja)
Other versions
JPS50155064A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6152474A priority Critical patent/JPS533584B2/ja
Publication of JPS50155064A publication Critical patent/JPS50155064A/ja
Publication of JPS533584B2 publication Critical patent/JPS533584B2/ja
Expired legal-status Critical Current

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  • Cleaning In General (AREA)
JP6152474A 1974-05-31 1974-05-31 Expired JPS533584B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6152474A JPS533584B2 (enrdf_load_stackoverflow) 1974-05-31 1974-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6152474A JPS533584B2 (enrdf_load_stackoverflow) 1974-05-31 1974-05-31

Publications (2)

Publication Number Publication Date
JPS50155064A JPS50155064A (enrdf_load_stackoverflow) 1975-12-13
JPS533584B2 true JPS533584B2 (enrdf_load_stackoverflow) 1978-02-08

Family

ID=13173560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6152474A Expired JPS533584B2 (enrdf_load_stackoverflow) 1974-05-31 1974-05-31

Country Status (1)

Country Link
JP (1) JPS533584B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019048298A (ja) * 2018-11-30 2019-03-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理装置の配管洗浄方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372379A (en) * 1976-12-09 1978-06-27 Kawasaki Steel Corp Method of removing scale attached to the inside wall of water pipe
JPH028592U (enrdf_load_stackoverflow) * 1988-06-30 1990-01-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019048298A (ja) * 2018-11-30 2019-03-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理装置の配管洗浄方法

Also Published As

Publication number Publication date
JPS50155064A (enrdf_load_stackoverflow) 1975-12-13

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