JPS5335638A - Electric power source - Google Patents

Electric power source

Info

Publication number
JPS5335638A
JPS5335638A JP11117277A JP11117277A JPS5335638A JP S5335638 A JPS5335638 A JP S5335638A JP 11117277 A JP11117277 A JP 11117277A JP 11117277 A JP11117277 A JP 11117277A JP S5335638 A JPS5335638 A JP S5335638A
Authority
JP
Japan
Prior art keywords
power source
electric power
electric
source
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11117277A
Other languages
Japanese (ja)
Other versions
JPS5637680B2 (en
Inventor
Erubuaruto Yan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON IONON KK
Original Assignee
NIPPON IONON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON IONON KK filed Critical NIPPON IONON KK
Publication of JPS5335638A publication Critical patent/JPS5335638A/en
Priority to US05/928,302 priority Critical patent/US4202311A/en
Priority to GB7831303A priority patent/GB2003250B/en
Priority to FR7822282A priority patent/FR2398887A1/en
Publication of JPS5637680B2 publication Critical patent/JPS5637680B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3385—Carburising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3387—Nitriding
JP11117277A 1976-09-14 1977-09-14 Electric power source Granted JPS5335638A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US05/928,302 US4202311A (en) 1977-07-27 1978-07-26 Means for resiliently connecting an oil pan to an engine body
GB7831303A GB2003250B (en) 1977-08-22 1978-07-27 Oil pan assemblages
FR7822282A FR2398887A1 (en) 1977-08-22 1978-07-27 INTERNAL COMBUSTION ENGINE WITH ELASTICALLY FIXED OIL PAN

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762641280 DE2641280A1 (en) 1976-09-14 1976-09-14 Glow discharge heat treatment or surface treatment of large workpieces - where conductors carrying large currents are supported via springs

Publications (2)

Publication Number Publication Date
JPS5335638A true JPS5335638A (en) 1978-04-03
JPS5637680B2 JPS5637680B2 (en) 1981-09-01

Family

ID=5987857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11117277A Granted JPS5335638A (en) 1976-09-14 1977-09-14 Electric power source

Country Status (2)

Country Link
JP (1) JPS5335638A (en)
DE (1) DE2641280A1 (en)

Also Published As

Publication number Publication date
DE2641280A1 (en) 1978-03-16
JPS5637680B2 (en) 1981-09-01

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