JPS5334468B2 - - Google Patents

Info

Publication number
JPS5334468B2
JPS5334468B2 JP8905676A JP8905676A JPS5334468B2 JP S5334468 B2 JPS5334468 B2 JP S5334468B2 JP 8905676 A JP8905676 A JP 8905676A JP 8905676 A JP8905676 A JP 8905676A JP S5334468 B2 JPS5334468 B2 JP S5334468B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8905676A
Other languages
Japanese (ja)
Other versions
JPS5315077A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8905676A priority Critical patent/JPS5315077A/ja
Publication of JPS5315077A publication Critical patent/JPS5315077A/ja
Publication of JPS5334468B2 publication Critical patent/JPS5334468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP8905676A 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus Granted JPS5315077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8905676A JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8905676A JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Publications (2)

Publication Number Publication Date
JPS5315077A JPS5315077A (en) 1978-02-10
JPS5334468B2 true JPS5334468B2 (enExample) 1978-09-20

Family

ID=13960191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8905676A Granted JPS5315077A (en) 1976-07-28 1976-07-28 Electron beam deflection controlling apparatus

Country Status (1)

Country Link
JP (1) JPS5315077A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622617U (enExample) * 1985-06-24 1987-01-09
JPH0254411U (enExample) * 1988-10-14 1990-04-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622617U (enExample) * 1985-06-24 1987-01-09
JPH0254411U (enExample) * 1988-10-14 1990-04-19

Also Published As

Publication number Publication date
JPS5315077A (en) 1978-02-10

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