JPS5333397B2 - - Google Patents
Info
- Publication number
- JPS5333397B2 JPS5333397B2 JP2494274A JP2494274A JPS5333397B2 JP S5333397 B2 JPS5333397 B2 JP S5333397B2 JP 2494274 A JP2494274 A JP 2494274A JP 2494274 A JP2494274 A JP 2494274A JP S5333397 B2 JPS5333397 B2 JP S5333397B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2494274A JPS5333397B2 (https=) | 1974-03-02 | 1974-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2494274A JPS5333397B2 (https=) | 1974-03-02 | 1974-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50119575A JPS50119575A (https=) | 1975-09-19 |
| JPS5333397B2 true JPS5333397B2 (https=) | 1978-09-13 |
Family
ID=12152078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2494274A Expired JPS5333397B2 (https=) | 1974-03-02 | 1974-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5333397B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53164763U (https=) * | 1977-05-31 | 1978-12-23 | ||
| JPS5511360A (en) * | 1978-07-11 | 1980-01-26 | Tokyo Ohka Kogyo Co Ltd | Plasma reaction treating system |
| JPS552199U (https=) * | 1979-07-05 | 1980-01-09 |
-
1974
- 1974-03-02 JP JP2494274A patent/JPS5333397B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50119575A (https=) | 1975-09-19 |