JPS5333366U - - Google Patents

Info

Publication number
JPS5333366U
JPS5333366U JP11407576U JP11407576U JPS5333366U JP S5333366 U JPS5333366 U JP S5333366U JP 11407576 U JP11407576 U JP 11407576U JP 11407576 U JP11407576 U JP 11407576U JP S5333366 U JPS5333366 U JP S5333366U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11407576U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11407576U priority Critical patent/JPS5333366U/ja
Publication of JPS5333366U publication Critical patent/JPS5333366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11407576U 1976-08-27 1976-08-27 Pending JPS5333366U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11407576U JPS5333366U (de) 1976-08-27 1976-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11407576U JPS5333366U (de) 1976-08-27 1976-08-27

Publications (1)

Publication Number Publication Date
JPS5333366U true JPS5333366U (de) 1978-03-23

Family

ID=28723747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11407576U Pending JPS5333366U (de) 1976-08-27 1976-08-27

Country Status (1)

Country Link
JP (1) JPS5333366U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498746A (ja) * 1990-08-13 1992-03-31 Hitachi Ltd 荷電粒子線装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034461A (de) * 1973-07-31 1975-04-02
JPS5184568A (ja) * 1975-01-22 1976-07-23 Nippon Electron Optics Lab Denkaihoshutsugatadenshiju

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034461A (de) * 1973-07-31 1975-04-02
JPS5184568A (ja) * 1975-01-22 1976-07-23 Nippon Electron Optics Lab Denkaihoshutsugatadenshiju

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498746A (ja) * 1990-08-13 1992-03-31 Hitachi Ltd 荷電粒子線装置

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