JPS5333029B2 - - Google Patents

Info

Publication number
JPS5333029B2
JPS5333029B2 JP10943372A JP10943372A JPS5333029B2 JP S5333029 B2 JPS5333029 B2 JP S5333029B2 JP 10943372 A JP10943372 A JP 10943372A JP 10943372 A JP10943372 A JP 10943372A JP S5333029 B2 JPS5333029 B2 JP S5333029B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10943372A
Other languages
Japanese (ja)
Other versions
JPS4967576A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10943372A priority Critical patent/JPS5333029B2/ja
Publication of JPS4967576A publication Critical patent/JPS4967576A/ja
Publication of JPS5333029B2 publication Critical patent/JPS5333029B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10943372A 1972-11-02 1972-11-02 Expired JPS5333029B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10943372A JPS5333029B2 (zh) 1972-11-02 1972-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10943372A JPS5333029B2 (zh) 1972-11-02 1972-11-02

Publications (2)

Publication Number Publication Date
JPS4967576A JPS4967576A (zh) 1974-07-01
JPS5333029B2 true JPS5333029B2 (zh) 1978-09-12

Family

ID=14510110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10943372A Expired JPS5333029B2 (zh) 1972-11-02 1972-11-02

Country Status (1)

Country Link
JP (1) JPS5333029B2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180132A (en) * 1975-01-09 1976-07-13 Kogyo Gijutsuin Shikisaikokahoni motozuku pataankaisekisochi
JPS5267986A (en) * 1975-12-04 1977-06-06 Fujitsu Ltd Pattern correction equipment
JP2984635B2 (ja) * 1996-10-23 1999-11-29 日本電気株式会社 高精度パターンの外観の検査方法および装置

Also Published As

Publication number Publication date
JPS4967576A (zh) 1974-07-01

Similar Documents

Publication Publication Date Title
FR2203943A1 (zh)
FR2190882B3 (zh)
JPS5333029B2 (zh)
JPS5427303B2 (zh)
JPS4979780U (zh)
FR2206664A6 (zh)
JPS4896164A (zh)
JPS5339480Y2 (zh)
JPS4961989A (zh)
CS150890B1 (zh)
CS151834B1 (zh)
CS152039B1 (zh)
CS154504B1 (zh)
JPS4946850U (zh)
CS156012B1 (zh)
CS156329B1 (zh)
CS156386B1 (zh)
CS157994B1 (zh)
RO59403A2 (zh)
CH576961A5 (zh)
CH555674A4 (zh)
CH576845A5 (zh)
CH579020A5 (zh)
CH546010A (zh)
CH579074A5 (zh)