JPS5333029B2 - - Google Patents

Info

Publication number
JPS5333029B2
JPS5333029B2 JP10943372A JP10943372A JPS5333029B2 JP S5333029 B2 JPS5333029 B2 JP S5333029B2 JP 10943372 A JP10943372 A JP 10943372A JP 10943372 A JP10943372 A JP 10943372A JP S5333029 B2 JPS5333029 B2 JP S5333029B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10943372A
Other languages
Japanese (ja)
Other versions
JPS4967576A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10943372A priority Critical patent/JPS5333029B2/ja
Publication of JPS4967576A publication Critical patent/JPS4967576A/ja
Publication of JPS5333029B2 publication Critical patent/JPS5333029B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
JP10943372A 1972-11-02 1972-11-02 Expired JPS5333029B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10943372A JPS5333029B2 (cg-RX-API-DMAC7.html) 1972-11-02 1972-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10943372A JPS5333029B2 (cg-RX-API-DMAC7.html) 1972-11-02 1972-11-02

Publications (2)

Publication Number Publication Date
JPS4967576A JPS4967576A (cg-RX-API-DMAC7.html) 1974-07-01
JPS5333029B2 true JPS5333029B2 (cg-RX-API-DMAC7.html) 1978-09-12

Family

ID=14510110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10943372A Expired JPS5333029B2 (cg-RX-API-DMAC7.html) 1972-11-02 1972-11-02

Country Status (1)

Country Link
JP (1) JPS5333029B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180132A (en) * 1975-01-09 1976-07-13 Kogyo Gijutsuin Shikisaikokahoni motozuku pataankaisekisochi
JPS5267986A (en) * 1975-12-04 1977-06-06 Fujitsu Ltd Pattern correction equipment
JP2984635B2 (ja) * 1996-10-23 1999-11-29 日本電気株式会社 高精度パターンの外観の検査方法および装置

Also Published As

Publication number Publication date
JPS4967576A (cg-RX-API-DMAC7.html) 1974-07-01

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