JPS5332322B2 - - Google Patents
Info
- Publication number
- JPS5332322B2 JPS5332322B2 JP162173A JP162173A JPS5332322B2 JP S5332322 B2 JPS5332322 B2 JP S5332322B2 JP 162173 A JP162173 A JP 162173A JP 162173 A JP162173 A JP 162173A JP S5332322 B2 JPS5332322 B2 JP S5332322B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162173A JPS5332322B2 (fr) | 1972-12-27 | 1972-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162173A JPS5332322B2 (fr) | 1972-12-27 | 1972-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4989625A JPS4989625A (fr) | 1974-08-27 |
| JPS5332322B2 true JPS5332322B2 (fr) | 1978-09-07 |
Family
ID=11506585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP162173A Expired JPS5332322B2 (fr) | 1972-12-27 | 1972-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5332322B2 (fr) |
-
1972
- 1972-12-27 JP JP162173A patent/JPS5332322B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4989625A (fr) | 1974-08-27 |