JPS5332322B2 - - Google Patents

Info

Publication number
JPS5332322B2
JPS5332322B2 JP162173A JP162173A JPS5332322B2 JP S5332322 B2 JPS5332322 B2 JP S5332322B2 JP 162173 A JP162173 A JP 162173A JP 162173 A JP162173 A JP 162173A JP S5332322 B2 JPS5332322 B2 JP S5332322B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP162173A
Other languages
Japanese (ja)
Other versions
JPS4989625A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP162173A priority Critical patent/JPS5332322B2/ja
Publication of JPS4989625A publication Critical patent/JPS4989625A/ja
Publication of JPS5332322B2 publication Critical patent/JPS5332322B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Furnace Details (AREA)
JP162173A 1972-12-27 1972-12-27 Expired JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP162173A JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-27 1972-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP162173A JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-27 1972-12-27

Publications (2)

Publication Number Publication Date
JPS4989625A JPS4989625A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-27
JPS5332322B2 true JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-09-07

Family

ID=11506585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP162173A Expired JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-27 1972-12-27

Country Status (1)

Country Link
JP (1) JPS5332322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS4989625A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-27

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