JPS5331829B2 - - Google Patents

Info

Publication number
JPS5331829B2
JPS5331829B2 JP3690472A JP3690472A JPS5331829B2 JP S5331829 B2 JPS5331829 B2 JP S5331829B2 JP 3690472 A JP3690472 A JP 3690472A JP 3690472 A JP3690472 A JP 3690472A JP S5331829 B2 JPS5331829 B2 JP S5331829B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3690472A
Other languages
Japanese (ja)
Other versions
JPS48103086A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3690472A priority Critical patent/JPS5331829B2/ja
Publication of JPS48103086A publication Critical patent/JPS48103086A/ja
Publication of JPS5331829B2 publication Critical patent/JPS5331829B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3690472A 1972-04-14 1972-04-14 Expired JPS5331829B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3690472A JPS5331829B2 (zh) 1972-04-14 1972-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3690472A JPS5331829B2 (zh) 1972-04-14 1972-04-14

Publications (2)

Publication Number Publication Date
JPS48103086A JPS48103086A (zh) 1973-12-24
JPS5331829B2 true JPS5331829B2 (zh) 1978-09-05

Family

ID=12482749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3690472A Expired JPS5331829B2 (zh) 1972-04-14 1972-04-14

Country Status (1)

Country Link
JP (1) JPS5331829B2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109797372A (zh) * 2019-03-28 2019-05-24 京东方科技集团股份有限公司 一种镀膜检测装置、镀膜设备及检测片切换方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113379A (en) * 1976-03-19 1977-09-22 Hitachi Ltd Vacuum evaporation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109797372A (zh) * 2019-03-28 2019-05-24 京东方科技集团股份有限公司 一种镀膜检测装置、镀膜设备及检测片切换方法

Also Published As

Publication number Publication date
JPS48103086A (zh) 1973-12-24

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