JPS5331829B2 - - Google Patents
Info
- Publication number
- JPS5331829B2 JPS5331829B2 JP3690472A JP3690472A JPS5331829B2 JP S5331829 B2 JPS5331829 B2 JP S5331829B2 JP 3690472 A JP3690472 A JP 3690472A JP 3690472 A JP3690472 A JP 3690472A JP S5331829 B2 JPS5331829 B2 JP S5331829B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3690472A JPS5331829B2 (en:Method) | 1972-04-14 | 1972-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3690472A JPS5331829B2 (en:Method) | 1972-04-14 | 1972-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48103086A JPS48103086A (en:Method) | 1973-12-24 |
| JPS5331829B2 true JPS5331829B2 (en:Method) | 1978-09-05 |
Family
ID=12482749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3690472A Expired JPS5331829B2 (en:Method) | 1972-04-14 | 1972-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5331829B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109797372A (zh) * | 2019-03-28 | 2019-05-24 | 京东方科技集团股份有限公司 | 一种镀膜检测装置、镀膜设备及检测片切换方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113379A (en) * | 1976-03-19 | 1977-09-22 | Hitachi Ltd | Vacuum evaporation |
-
1972
- 1972-04-14 JP JP3690472A patent/JPS5331829B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109797372A (zh) * | 2019-03-28 | 2019-05-24 | 京东方科技集团股份有限公司 | 一种镀膜检测装置、镀膜设备及检测片切换方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS48103086A (en:Method) | 1973-12-24 |