JPS5329797B2 - - Google Patents
Info
- Publication number
- JPS5329797B2 JPS5329797B2 JP1826175A JP1826175A JPS5329797B2 JP S5329797 B2 JPS5329797 B2 JP S5329797B2 JP 1826175 A JP1826175 A JP 1826175A JP 1826175 A JP1826175 A JP 1826175A JP S5329797 B2 JPS5329797 B2 JP S5329797B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1826175A JPS5329797B2 (Direct) | 1975-02-13 | 1975-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1826175A JPS5329797B2 (Direct) | 1975-02-13 | 1975-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5193000A JPS5193000A (Direct) | 1976-08-14 |
| JPS5329797B2 true JPS5329797B2 (Direct) | 1978-08-23 |
Family
ID=11966725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1826175A Expired JPS5329797B2 (Direct) | 1975-02-13 | 1975-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329797B2 (Direct) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151737A (ja) * | 1983-02-17 | 1984-08-30 | Semiconductor Res Found | イオン源 |
-
1975
- 1975-02-13 JP JP1826175A patent/JPS5329797B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5193000A (Direct) | 1976-08-14 |