JPS5329101Y2 - - Google Patents
Info
- Publication number
- JPS5329101Y2 JPS5329101Y2 JP1973008340U JP834073U JPS5329101Y2 JP S5329101 Y2 JPS5329101 Y2 JP S5329101Y2 JP 1973008340 U JP1973008340 U JP 1973008340U JP 834073 U JP834073 U JP 834073U JP S5329101 Y2 JPS5329101 Y2 JP S5329101Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973008340U JPS5329101Y2 (ko) | 1973-01-19 | 1973-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973008340U JPS5329101Y2 (ko) | 1973-01-19 | 1973-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49110562U JPS49110562U (ko) | 1974-09-20 |
| JPS5329101Y2 true JPS5329101Y2 (ko) | 1978-07-21 |
Family
ID=28076071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973008340U Expired JPS5329101Y2 (ko) | 1973-01-19 | 1973-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5329101Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015185750A (ja) * | 2014-03-25 | 2015-10-22 | 東京エレクトロン株式会社 | 真空処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311576A (en) * | 1976-07-19 | 1978-02-02 | Handotai Kenkyu Shinkokai | Method of forming thin film by vapourrgrowth |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4325497Y1 (ko) * | 1966-03-02 | 1968-10-25 |
-
1973
- 1973-01-19 JP JP1973008340U patent/JPS5329101Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4325497Y1 (ko) * | 1966-03-02 | 1968-10-25 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015185750A (ja) * | 2014-03-25 | 2015-10-22 | 東京エレクトロン株式会社 | 真空処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49110562U (ko) | 1974-09-20 |