JPS5328872U - - Google Patents
Info
- Publication number
- JPS5328872U JPS5328872U JP11200876U JP11200876U JPS5328872U JP S5328872 U JPS5328872 U JP S5328872U JP 11200876 U JP11200876 U JP 11200876U JP 11200876 U JP11200876 U JP 11200876U JP S5328872 U JPS5328872 U JP S5328872U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976112008U JPS563976Y2 (ko) | 1976-08-20 | 1976-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976112008U JPS563976Y2 (ko) | 1976-08-20 | 1976-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5328872U true JPS5328872U (ko) | 1978-03-11 |
| JPS563976Y2 JPS563976Y2 (ko) | 1981-01-28 |
Family
ID=28721792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976112008U Expired JPS563976Y2 (ko) | 1976-08-20 | 1976-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS563976Y2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6328554A (ja) * | 1986-07-17 | 1988-02-06 | Agency Of Ind Science & Technol | 超精密加工用形状可変工具 |
| JP2009108349A (ja) * | 2007-10-26 | 2009-05-21 | Ricoh Co Ltd | 保持治具、薄膜形成装置、及び薄膜形成方法 |
-
1976
- 1976-08-20 JP JP1976112008U patent/JPS563976Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6328554A (ja) * | 1986-07-17 | 1988-02-06 | Agency Of Ind Science & Technol | 超精密加工用形状可変工具 |
| JPH0558864B2 (ko) * | 1986-07-17 | 1993-08-27 | Kogyo Gijutsuin | |
| JP2009108349A (ja) * | 2007-10-26 | 2009-05-21 | Ricoh Co Ltd | 保持治具、薄膜形成装置、及び薄膜形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS563976Y2 (ko) | 1981-01-28 |