JPS5328872U - - Google Patents

Info

Publication number
JPS5328872U
JPS5328872U JP11200876U JP11200876U JPS5328872U JP S5328872 U JPS5328872 U JP S5328872U JP 11200876 U JP11200876 U JP 11200876U JP 11200876 U JP11200876 U JP 11200876U JP S5328872 U JPS5328872 U JP S5328872U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11200876U
Other languages
Japanese (ja)
Other versions
JPS563976Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976112008U priority Critical patent/JPS563976Y2/ja
Publication of JPS5328872U publication Critical patent/JPS5328872U/ja
Application granted granted Critical
Publication of JPS563976Y2 publication Critical patent/JPS563976Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP1976112008U 1976-08-20 1976-08-20 Expired JPS563976Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976112008U JPS563976Y2 (enrdf_load_html_response) 1976-08-20 1976-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976112008U JPS563976Y2 (enrdf_load_html_response) 1976-08-20 1976-08-20

Publications (2)

Publication Number Publication Date
JPS5328872U true JPS5328872U (enrdf_load_html_response) 1978-03-11
JPS563976Y2 JPS563976Y2 (enrdf_load_html_response) 1981-01-28

Family

ID=28721792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976112008U Expired JPS563976Y2 (enrdf_load_html_response) 1976-08-20 1976-08-20

Country Status (1)

Country Link
JP (1) JPS563976Y2 (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6328554A (ja) * 1986-07-17 1988-02-06 Agency Of Ind Science & Technol 超精密加工用形状可変工具
JP2009108349A (ja) * 2007-10-26 2009-05-21 Ricoh Co Ltd 保持治具、薄膜形成装置、及び薄膜形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6328554A (ja) * 1986-07-17 1988-02-06 Agency Of Ind Science & Technol 超精密加工用形状可変工具
JP2009108349A (ja) * 2007-10-26 2009-05-21 Ricoh Co Ltd 保持治具、薄膜形成装置、及び薄膜形成方法

Also Published As

Publication number Publication date
JPS563976Y2 (enrdf_load_html_response) 1981-01-28

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