JPS5328772U - - Google Patents

Info

Publication number
JPS5328772U
JPS5328772U JP11132176U JP11132176U JPS5328772U JP S5328772 U JPS5328772 U JP S5328772U JP 11132176 U JP11132176 U JP 11132176U JP 11132176 U JP11132176 U JP 11132176U JP S5328772 U JPS5328772 U JP S5328772U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11132176U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11132176U priority Critical patent/JPS5328772U/ja
Publication of JPS5328772U publication Critical patent/JPS5328772U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11132176U 1976-08-18 1976-08-18 Pending JPS5328772U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11132176U JPS5328772U (en) 1976-08-18 1976-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11132176U JPS5328772U (en) 1976-08-18 1976-08-18

Publications (1)

Publication Number Publication Date
JPS5328772U true JPS5328772U (en) 1978-03-11

Family

ID=28721152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11132176U Pending JPS5328772U (en) 1976-08-18 1976-08-18

Country Status (1)

Country Link
JP (1) JPS5328772U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117659U (en) * 1980-02-12 1981-09-08
JPS58142213A (en) * 1982-02-19 1983-08-24 Hitachi Ltd Method for detecting projection on magnetic disk
JPS59180313A (en) * 1983-03-30 1984-10-13 Toshiba Corp Surface inspecting device
WO2010100973A1 (en) * 2009-03-06 2010-09-10 株式会社日立ハイテクノロジーズ Surface inspecting apparatus and surface inspecting method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117659U (en) * 1980-02-12 1981-09-08
JPS6141562Y2 (en) * 1980-02-12 1986-11-26
JPS58142213A (en) * 1982-02-19 1983-08-24 Hitachi Ltd Method for detecting projection on magnetic disk
JPS59180313A (en) * 1983-03-30 1984-10-13 Toshiba Corp Surface inspecting device
WO2010100973A1 (en) * 2009-03-06 2010-09-10 株式会社日立ハイテクノロジーズ Surface inspecting apparatus and surface inspecting method
US8493557B2 (en) 2009-03-06 2013-07-23 Hitachi High-Technologies Corporation Surface inspecting apparatus and surface inspecting method
US9046499B2 (en) 2009-03-06 2015-06-02 Hitachi High-Technologies Corporation Surface inspecting apparatus and surface inspecting method

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