JPS5328772U - - Google Patents
Info
- Publication number
- JPS5328772U JPS5328772U JP11132176U JP11132176U JPS5328772U JP S5328772 U JPS5328772 U JP S5328772U JP 11132176 U JP11132176 U JP 11132176U JP 11132176 U JP11132176 U JP 11132176U JP S5328772 U JPS5328772 U JP S5328772U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11132176U JPS5328772U (en) | 1976-08-18 | 1976-08-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11132176U JPS5328772U (en) | 1976-08-18 | 1976-08-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5328772U true JPS5328772U (en) | 1978-03-11 |
Family
ID=28721152
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11132176U Pending JPS5328772U (en) | 1976-08-18 | 1976-08-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5328772U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56117659U (en) * | 1980-02-12 | 1981-09-08 | ||
JPS58142213A (en) * | 1982-02-19 | 1983-08-24 | Hitachi Ltd | Method for detecting projection on magnetic disk |
JPS59180313A (en) * | 1983-03-30 | 1984-10-13 | Toshiba Corp | Surface inspecting device |
WO2010100973A1 (en) * | 2009-03-06 | 2010-09-10 | 株式会社日立ハイテクノロジーズ | Surface inspecting apparatus and surface inspecting method |
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1976
- 1976-08-18 JP JP11132176U patent/JPS5328772U/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56117659U (en) * | 1980-02-12 | 1981-09-08 | ||
JPS6141562Y2 (en) * | 1980-02-12 | 1986-11-26 | ||
JPS58142213A (en) * | 1982-02-19 | 1983-08-24 | Hitachi Ltd | Method for detecting projection on magnetic disk |
JPS59180313A (en) * | 1983-03-30 | 1984-10-13 | Toshiba Corp | Surface inspecting device |
WO2010100973A1 (en) * | 2009-03-06 | 2010-09-10 | 株式会社日立ハイテクノロジーズ | Surface inspecting apparatus and surface inspecting method |
US8493557B2 (en) | 2009-03-06 | 2013-07-23 | Hitachi High-Technologies Corporation | Surface inspecting apparatus and surface inspecting method |
US9046499B2 (en) | 2009-03-06 | 2015-06-02 | Hitachi High-Technologies Corporation | Surface inspecting apparatus and surface inspecting method |