JPS5328426U - - Google Patents

Info

Publication number
JPS5328426U
JPS5328426U JP11121976U JP11121976U JPS5328426U JP S5328426 U JPS5328426 U JP S5328426U JP 11121976 U JP11121976 U JP 11121976U JP 11121976 U JP11121976 U JP 11121976U JP S5328426 U JPS5328426 U JP S5328426U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11121976U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11121976U priority Critical patent/JPS5328426U/ja
Publication of JPS5328426U publication Critical patent/JPS5328426U/ja
Pending legal-status Critical Current

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JP11121976U 1976-08-18 1976-08-18 Pending JPS5328426U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11121976U JPS5328426U (zh) 1976-08-18 1976-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11121976U JPS5328426U (zh) 1976-08-18 1976-08-18

Publications (1)

Publication Number Publication Date
JPS5328426U true JPS5328426U (zh) 1978-03-10

Family

ID=28721057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11121976U Pending JPS5328426U (zh) 1976-08-18 1976-08-18

Country Status (1)

Country Link
JP (1) JPS5328426U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381331A (ja) * 1986-09-25 1988-04-12 Orc Mfg Co Ltd 露光装置におけるマスクフイルム保持方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4217869Y1 (zh) * 1965-03-15 1967-10-17
JPS4420741Y1 (zh) * 1966-06-10 1969-09-04
JPS51111218A (en) * 1975-03-03 1976-10-01 Corning Glass Works Crystalline glass of cordierite group* and ceramic products of the same glass

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4217869Y1 (zh) * 1965-03-15 1967-10-17
JPS4420741Y1 (zh) * 1966-06-10 1969-09-04
JPS51111218A (en) * 1975-03-03 1976-10-01 Corning Glass Works Crystalline glass of cordierite group* and ceramic products of the same glass

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381331A (ja) * 1986-09-25 1988-04-12 Orc Mfg Co Ltd 露光装置におけるマスクフイルム保持方法

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