JPS5327500Y2 - - Google Patents

Info

Publication number
JPS5327500Y2
JPS5327500Y2 JP7005473U JP7005473U JPS5327500Y2 JP S5327500 Y2 JPS5327500 Y2 JP S5327500Y2 JP 7005473 U JP7005473 U JP 7005473U JP 7005473 U JP7005473 U JP 7005473U JP S5327500 Y2 JPS5327500 Y2 JP S5327500Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7005473U
Other languages
Japanese (ja)
Other versions
JPS5018170U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7005473U priority Critical patent/JPS5327500Y2/ja
Publication of JPS5018170U publication Critical patent/JPS5018170U/ja
Application granted granted Critical
Publication of JPS5327500Y2 publication Critical patent/JPS5327500Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP7005473U 1973-06-15 1973-06-15 Expired JPS5327500Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7005473U JPS5327500Y2 (https=) 1973-06-15 1973-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7005473U JPS5327500Y2 (https=) 1973-06-15 1973-06-15

Publications (2)

Publication Number Publication Date
JPS5018170U JPS5018170U (https=) 1975-02-27
JPS5327500Y2 true JPS5327500Y2 (https=) 1978-07-12

Family

ID=28238513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7005473U Expired JPS5327500Y2 (https=) 1973-06-15 1973-06-15

Country Status (1)

Country Link
JP (1) JPS5327500Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54182246U (https=) * 1978-06-13 1979-12-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54182246U (https=) * 1978-06-13 1979-12-24

Also Published As

Publication number Publication date
JPS5018170U (https=) 1975-02-27

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