JPS5326517B2 - - Google Patents

Info

Publication number
JPS5326517B2
JPS5326517B2 JP1299572A JP1299572A JPS5326517B2 JP S5326517 B2 JPS5326517 B2 JP S5326517B2 JP 1299572 A JP1299572 A JP 1299572A JP 1299572 A JP1299572 A JP 1299572A JP S5326517 B2 JPS5326517 B2 JP S5326517B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1299572A
Other languages
Japanese (ja)
Other versions
JPS4883851A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1299572A priority Critical patent/JPS5326517B2/ja
Publication of JPS4883851A publication Critical patent/JPS4883851A/ja
Publication of JPS5326517B2 publication Critical patent/JPS5326517B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP1299572A 1972-02-05 1972-02-05 Expired JPS5326517B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1299572A JPS5326517B2 (xx) 1972-02-05 1972-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1299572A JPS5326517B2 (xx) 1972-02-05 1972-02-05

Publications (2)

Publication Number Publication Date
JPS4883851A JPS4883851A (xx) 1973-11-08
JPS5326517B2 true JPS5326517B2 (xx) 1978-08-02

Family

ID=11820772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1299572A Expired JPS5326517B2 (xx) 1972-02-05 1972-02-05

Country Status (1)

Country Link
JP (1) JPS5326517B2 (xx)

Also Published As

Publication number Publication date
JPS4883851A (xx) 1973-11-08

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