JPS5325809Y2 - - Google Patents

Info

Publication number
JPS5325809Y2
JPS5325809Y2 JP13187972U JP13187972U JPS5325809Y2 JP S5325809 Y2 JPS5325809 Y2 JP S5325809Y2 JP 13187972 U JP13187972 U JP 13187972U JP 13187972 U JP13187972 U JP 13187972U JP S5325809 Y2 JPS5325809 Y2 JP S5325809Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13187972U
Other languages
Japanese (ja)
Other versions
JPS4986353U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13187972U priority Critical patent/JPS5325809Y2/ja
Publication of JPS4986353U publication Critical patent/JPS4986353U/ja
Application granted granted Critical
Publication of JPS5325809Y2 publication Critical patent/JPS5325809Y2/ja
Expired legal-status Critical Current

Links

JP13187972U 1972-11-15 1972-11-15 Expired JPS5325809Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13187972U JPS5325809Y2 (cs) 1972-11-15 1972-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13187972U JPS5325809Y2 (cs) 1972-11-15 1972-11-15

Publications (2)

Publication Number Publication Date
JPS4986353U JPS4986353U (cs) 1974-07-26
JPS5325809Y2 true JPS5325809Y2 (cs) 1978-07-01

Family

ID=28394059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13187972U Expired JPS5325809Y2 (cs) 1972-11-15 1972-11-15

Country Status (1)

Country Link
JP (1) JPS5325809Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0319216A (ja) * 1989-06-15 1991-01-28 Nec Corp ウェット処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0319216A (ja) * 1989-06-15 1991-01-28 Nec Corp ウェット処理装置

Also Published As

Publication number Publication date
JPS4986353U (cs) 1974-07-26

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