JPS5325433U - - Google Patents

Info

Publication number
JPS5325433U
JPS5325433U JP10713676U JP10713676U JPS5325433U JP S5325433 U JPS5325433 U JP S5325433U JP 10713676 U JP10713676 U JP 10713676U JP 10713676 U JP10713676 U JP 10713676U JP S5325433 U JPS5325433 U JP S5325433U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10713676U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10713676U priority Critical patent/JPS5325433U/ja
Publication of JPS5325433U publication Critical patent/JPS5325433U/ja
Pending legal-status Critical Current

Links

JP10713676U 1976-08-10 1976-08-10 Pending JPS5325433U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10713676U JPS5325433U (enExample) 1976-08-10 1976-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10713676U JPS5325433U (enExample) 1976-08-10 1976-08-10

Publications (1)

Publication Number Publication Date
JPS5325433U true JPS5325433U (enExample) 1978-03-03

Family

ID=28717187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10713676U Pending JPS5325433U (enExample) 1976-08-10 1976-08-10

Country Status (1)

Country Link
JP (1) JPS5325433U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079971U (ja) * 1993-07-05 1995-02-10 日電アネルバ株式会社 バイアススパッタ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079971U (ja) * 1993-07-05 1995-02-10 日電アネルバ株式会社 バイアススパッタ装置

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