JPS5325267U - - Google Patents
Info
- Publication number
- JPS5325267U JPS5325267U JP10672676U JP10672676U JPS5325267U JP S5325267 U JPS5325267 U JP S5325267U JP 10672676 U JP10672676 U JP 10672676U JP 10672676 U JP10672676 U JP 10672676U JP S5325267 U JPS5325267 U JP S5325267U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10672676U JPS5325267U (en) | 1976-08-10 | 1976-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10672676U JPS5325267U (en) | 1976-08-10 | 1976-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5325267U true JPS5325267U (en) | 1978-03-03 |
Family
ID=28716812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10672676U Pending JPS5325267U (en) | 1976-08-10 | 1976-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5325267U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018182023A (en) * | 2017-04-11 | 2018-11-15 | 東京エレクトロン株式会社 | Substrate processing apparatus |
-
1976
- 1976-08-10 JP JP10672676U patent/JPS5325267U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018182023A (en) * | 2017-04-11 | 2018-11-15 | 東京エレクトロン株式会社 | Substrate processing apparatus |