JPS5325239B2 - - Google Patents
Info
- Publication number
- JPS5325239B2 JPS5325239B2 JP6036172A JP6036172A JPS5325239B2 JP S5325239 B2 JPS5325239 B2 JP S5325239B2 JP 6036172 A JP6036172 A JP 6036172A JP 6036172 A JP6036172 A JP 6036172A JP S5325239 B2 JPS5325239 B2 JP S5325239B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6036172A JPS5325239B2 (mo) | 1972-06-16 | 1972-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6036172A JPS5325239B2 (mo) | 1972-06-16 | 1972-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4924673A JPS4924673A (mo) | 1974-03-05 |
| JPS5325239B2 true JPS5325239B2 (mo) | 1978-07-25 |
Family
ID=13139913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6036172A Expired JPS5325239B2 (mo) | 1972-06-16 | 1972-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5325239B2 (mo) |
-
1972
- 1972-06-16 JP JP6036172A patent/JPS5325239B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4924673A (mo) | 1974-03-05 |