JPS5324783Y2 - - Google Patents
Info
- Publication number
- JPS5324783Y2 JPS5324783Y2 JP11614075U JP11614075U JPS5324783Y2 JP S5324783 Y2 JPS5324783 Y2 JP S5324783Y2 JP 11614075 U JP11614075 U JP 11614075U JP 11614075 U JP11614075 U JP 11614075U JP S5324783 Y2 JPS5324783 Y2 JP S5324783Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- De-Stacking Of Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11614075U JPS5324783Y2 (en:Method) | 1975-08-22 | 1975-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11614075U JPS5324783Y2 (en:Method) | 1975-08-22 | 1975-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5230079U JPS5230079U (en:Method) | 1977-03-02 |
| JPS5324783Y2 true JPS5324783Y2 (en:Method) | 1978-06-24 |
Family
ID=28597070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11614075U Expired JPS5324783Y2 (en:Method) | 1975-08-22 | 1975-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5324783Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
-
1975
- 1975-08-22 JP JP11614075U patent/JPS5324783Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
| US9464992B2 (en) | 1998-07-15 | 2016-10-11 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5230079U (en:Method) | 1977-03-02 |