JPS5324782B2 - - Google Patents
Info
- Publication number
- JPS5324782B2 JPS5324782B2 JP13136675A JP13136675A JPS5324782B2 JP S5324782 B2 JPS5324782 B2 JP S5324782B2 JP 13136675 A JP13136675 A JP 13136675A JP 13136675 A JP13136675 A JP 13136675A JP S5324782 B2 JPS5324782 B2 JP S5324782B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13136675A JPS5255864A (en) | 1975-11-04 | 1975-11-04 | Dry etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13136675A JPS5255864A (en) | 1975-11-04 | 1975-11-04 | Dry etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5255864A JPS5255864A (en) | 1977-05-07 |
| JPS5324782B2 true JPS5324782B2 (pt) | 1978-07-22 |
Family
ID=15056235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13136675A Granted JPS5255864A (en) | 1975-11-04 | 1975-11-04 | Dry etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5255864A (pt) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2531774A1 (fr) * | 1982-08-12 | 1984-02-17 | Cit Alcatel | Dispositif de controle d'epaisseur de couches minces faiblement absorbantes |
| FR2555308B1 (fr) * | 1983-11-21 | 1986-12-05 | Cit Alcatel | Tete photometrique et applications a des dispositifs de controle de l'epaisseur d'une couche mince |
| FR2616269B1 (fr) * | 1987-06-04 | 1990-11-09 | Labo Electronique Physique | Dispositif de test pour la mise en oeuvre d'un procede de realisation de dispositifs semiconducteurs |
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1975
- 1975-11-04 JP JP13136675A patent/JPS5255864A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5255864A (en) | 1977-05-07 |