JPS5324782B2 - - Google Patents

Info

Publication number
JPS5324782B2
JPS5324782B2 JP13136675A JP13136675A JPS5324782B2 JP S5324782 B2 JPS5324782 B2 JP S5324782B2 JP 13136675 A JP13136675 A JP 13136675A JP 13136675 A JP13136675 A JP 13136675A JP S5324782 B2 JPS5324782 B2 JP S5324782B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13136675A
Other languages
Japanese (ja)
Other versions
JPS5255864A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13136675A priority Critical patent/JPS5255864A/ja
Publication of JPS5255864A publication Critical patent/JPS5255864A/ja
Publication of JPS5324782B2 publication Critical patent/JPS5324782B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP13136675A 1975-11-04 1975-11-04 Dry etching device Granted JPS5255864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13136675A JPS5255864A (en) 1975-11-04 1975-11-04 Dry etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13136675A JPS5255864A (en) 1975-11-04 1975-11-04 Dry etching device

Publications (2)

Publication Number Publication Date
JPS5255864A JPS5255864A (en) 1977-05-07
JPS5324782B2 true JPS5324782B2 (de) 1978-07-22

Family

ID=15056235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13136675A Granted JPS5255864A (en) 1975-11-04 1975-11-04 Dry etching device

Country Status (1)

Country Link
JP (1) JPS5255864A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2531774A1 (fr) * 1982-08-12 1984-02-17 Cit Alcatel Dispositif de controle d'epaisseur de couches minces faiblement absorbantes
FR2555308B1 (fr) * 1983-11-21 1986-12-05 Cit Alcatel Tete photometrique et applications a des dispositifs de controle de l'epaisseur d'une couche mince
FR2616269B1 (fr) * 1987-06-04 1990-11-09 Labo Electronique Physique Dispositif de test pour la mise en oeuvre d'un procede de realisation de dispositifs semiconducteurs

Also Published As

Publication number Publication date
JPS5255864A (en) 1977-05-07

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