JPS5324781B2 - - Google Patents

Info

Publication number
JPS5324781B2
JPS5324781B2 JP12702775A JP12702775A JPS5324781B2 JP S5324781 B2 JPS5324781 B2 JP S5324781B2 JP 12702775 A JP12702775 A JP 12702775A JP 12702775 A JP12702775 A JP 12702775A JP S5324781 B2 JPS5324781 B2 JP S5324781B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12702775A
Other languages
Japanese (ja)
Other versions
JPS5250689A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50127027A priority Critical patent/JPS5250689A/ja
Publication of JPS5250689A publication Critical patent/JPS5250689A/ja
Publication of JPS5324781B2 publication Critical patent/JPS5324781B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP50127027A 1975-10-22 1975-10-22 Checking device for defect of directional pattern Granted JPS5250689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50127027A JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50127027A JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Publications (2)

Publication Number Publication Date
JPS5250689A JPS5250689A (en) 1977-04-22
JPS5324781B2 true JPS5324781B2 (US06299757-20011009-C00006.png) 1978-07-22

Family

ID=14949853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50127027A Granted JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Country Status (1)

Country Link
JP (1) JPS5250689A (US06299757-20011009-C00006.png)

Also Published As

Publication number Publication date
JPS5250689A (en) 1977-04-22

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