JPS5324594B2 - - Google Patents

Info

Publication number
JPS5324594B2
JPS5324594B2 JP2436474A JP2436474A JPS5324594B2 JP S5324594 B2 JPS5324594 B2 JP S5324594B2 JP 2436474 A JP2436474 A JP 2436474A JP 2436474 A JP2436474 A JP 2436474A JP S5324594 B2 JPS5324594 B2 JP S5324594B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2436474A
Other versions
JPS50118187A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2436474A priority Critical patent/JPS5324594B2/ja
Publication of JPS50118187A publication Critical patent/JPS50118187A/ja
Publication of JPS5324594B2 publication Critical patent/JPS5324594B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Or Angular Velocity Measurement And Their Indicating Devices (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Control Of Velocity Or Acceleration (AREA)
  • Control Of Linear Motors (AREA)
JP2436474A 1974-03-01 1974-03-01 Expired JPS5324594B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2436474A JPS5324594B2 (ja) 1974-03-01 1974-03-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2436474A JPS5324594B2 (ja) 1974-03-01 1974-03-01

Publications (2)

Publication Number Publication Date
JPS50118187A JPS50118187A (ja) 1975-09-16
JPS5324594B2 true JPS5324594B2 (ja) 1978-07-21

Family

ID=12136130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2436474A Expired JPS5324594B2 (ja) 1974-03-01 1974-03-01

Country Status (1)

Country Link
JP (1) JPS5324594B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016606A1 (en) * 1990-04-18 1991-10-31 Advantest Corporation Michelson interferometer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200103A (ja) * 1982-05-17 1983-11-21 Sony Corp 光干渉式測長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016606A1 (en) * 1990-04-18 1991-10-31 Advantest Corporation Michelson interferometer

Also Published As

Publication number Publication date
JPS50118187A (ja) 1975-09-16

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