JPS5323172B2 - - Google Patents

Info

Publication number
JPS5323172B2
JPS5323172B2 JP11874873A JP11874873A JPS5323172B2 JP S5323172 B2 JPS5323172 B2 JP S5323172B2 JP 11874873 A JP11874873 A JP 11874873A JP 11874873 A JP11874873 A JP 11874873A JP S5323172 B2 JPS5323172 B2 JP S5323172B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11874873A
Other languages
Japanese (ja)
Other versions
JPS5068546A (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11874873A priority Critical patent/JPS5323172B2/ja
Publication of JPS5068546A publication Critical patent/JPS5068546A/ja
Publication of JPS5323172B2 publication Critical patent/JPS5323172B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP11874873A 1973-10-22 1973-10-22 Expired JPS5323172B2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11874873A JPS5323172B2 (OSRAM) 1973-10-22 1973-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11874873A JPS5323172B2 (OSRAM) 1973-10-22 1973-10-22

Publications (2)

Publication Number Publication Date
JPS5068546A JPS5068546A (OSRAM) 1975-06-07
JPS5323172B2 true JPS5323172B2 (OSRAM) 1978-07-13

Family

ID=14744066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11874873A Expired JPS5323172B2 (OSRAM) 1973-10-22 1973-10-22

Country Status (1)

Country Link
JP (1) JPS5323172B2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531496U (OSRAM) * 1978-08-22 1980-02-29

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128805A (ja) * 1984-07-20 1986-02-08 Toho Denshi Kogyo Kk 微細幅測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531496U (OSRAM) * 1978-08-22 1980-02-29

Also Published As

Publication number Publication date
JPS5068546A (OSRAM) 1975-06-07

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