JPS5322426B2 - - Google Patents

Info

Publication number
JPS5322426B2
JPS5322426B2 JP1920975A JP1920975A JPS5322426B2 JP S5322426 B2 JPS5322426 B2 JP S5322426B2 JP 1920975 A JP1920975 A JP 1920975A JP 1920975 A JP1920975 A JP 1920975A JP S5322426 B2 JPS5322426 B2 JP S5322426B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1920975A
Other languages
Japanese (ja)
Other versions
JPS5193875A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1920975A priority Critical patent/JPS5322426B2/ja
Publication of JPS5193875A publication Critical patent/JPS5193875A/ja
Publication of JPS5322426B2 publication Critical patent/JPS5322426B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1920975A 1975-02-15 1975-02-15 Expired JPS5322426B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1920975A JPS5322426B2 (enrdf_load_stackoverflow) 1975-02-15 1975-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1920975A JPS5322426B2 (enrdf_load_stackoverflow) 1975-02-15 1975-02-15

Publications (2)

Publication Number Publication Date
JPS5193875A JPS5193875A (enrdf_load_stackoverflow) 1976-08-17
JPS5322426B2 true JPS5322426B2 (enrdf_load_stackoverflow) 1978-07-08

Family

ID=11992965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1920975A Expired JPS5322426B2 (enrdf_load_stackoverflow) 1975-02-15 1975-02-15

Country Status (1)

Country Link
JP (1) JPS5322426B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105271A (enrdf_load_stackoverflow) * 1975-03-13 1976-09-17 Ulvac Corp
JPS5352073A (en) * 1976-10-22 1978-05-12 Hoya Denshi Kk Photomask for ic
JPS6135926Y2 (enrdf_load_stackoverflow) * 1977-05-04 1986-10-18
JPS55121441A (en) * 1979-03-14 1980-09-18 Fujitsu Ltd Mask for far ultraviolet exposure
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side
JPS6252550A (ja) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp フオトマスク材料
JPH0616170B2 (ja) * 1986-07-25 1994-03-02 ホ−ヤ株式会社 フオトマスクブランクとフオトマスク
JPS6333124U (enrdf_load_stackoverflow) * 1987-08-07 1988-03-03

Also Published As

Publication number Publication date
JPS5193875A (enrdf_load_stackoverflow) 1976-08-17

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