JPS5321990B2 - - Google Patents
Info
- Publication number
- JPS5321990B2 JPS5321990B2 JP13173373A JP13173373A JPS5321990B2 JP S5321990 B2 JPS5321990 B2 JP S5321990B2 JP 13173373 A JP13173373 A JP 13173373A JP 13173373 A JP13173373 A JP 13173373A JP S5321990 B2 JPS5321990 B2 JP S5321990B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13173373A JPS5321990B2 (enExample) | 1973-11-26 | 1973-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13173373A JPS5321990B2 (enExample) | 1973-11-26 | 1973-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084176A JPS5084176A (enExample) | 1975-07-07 |
| JPS5321990B2 true JPS5321990B2 (enExample) | 1978-07-06 |
Family
ID=15064911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13173373A Expired JPS5321990B2 (enExample) | 1973-11-26 | 1973-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5321990B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102019217846A1 (de) | 2018-11-21 | 2020-05-28 | Toyota Jidosha Kabushiki Kaisha | Drehzahlverringerungsvorrichtung und bremsaktuator mit einer solchen vorrichtung |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52127772U (enExample) * | 1976-03-26 | 1977-09-28 | ||
| JPS5612837Y2 (enExample) * | 1976-03-31 | 1981-03-25 | ||
| US4139442A (en) * | 1977-09-13 | 1979-02-13 | International Business Machines Corporation | Reactive ion etching method for producing deep dielectric isolation in silicon |
| JP2666465B2 (ja) * | 1989-04-21 | 1997-10-22 | 日本電気株式会社 | 半導体装置の製造方法 |
-
1973
- 1973-11-26 JP JP13173373A patent/JPS5321990B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102019217846A1 (de) | 2018-11-21 | 2020-05-28 | Toyota Jidosha Kabushiki Kaisha | Drehzahlverringerungsvorrichtung und bremsaktuator mit einer solchen vorrichtung |
| DE102019217846B4 (de) | 2018-11-21 | 2021-10-28 | Toyota Jidosha Kabushiki Kaisha | Drehzahlverringerungsvorrichtung und Bremsaktuator mit einer solchen Vorrichtung |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5084176A (enExample) | 1975-07-07 |