JPS5321990B2 - - Google Patents

Info

Publication number
JPS5321990B2
JPS5321990B2 JP13173373A JP13173373A JPS5321990B2 JP S5321990 B2 JPS5321990 B2 JP S5321990B2 JP 13173373 A JP13173373 A JP 13173373A JP 13173373 A JP13173373 A JP 13173373A JP S5321990 B2 JPS5321990 B2 JP S5321990B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13173373A
Other languages
Japanese (ja)
Other versions
JPS5084176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13173373A priority Critical patent/JPS5321990B2/ja
Publication of JPS5084176A publication Critical patent/JPS5084176A/ja
Publication of JPS5321990B2 publication Critical patent/JPS5321990B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP13173373A 1973-11-26 1973-11-26 Expired JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13173373A JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26 1973-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13173373A JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26 1973-11-26

Publications (2)

Publication Number Publication Date
JPS5084176A JPS5084176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-07
JPS5321990B2 true JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-06

Family

ID=15064911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13173373A Expired JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-26 1973-11-26

Country Status (1)

Country Link
JP (1) JPS5321990B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019217846A1 (de) 2018-11-21 2020-05-28 Toyota Jidosha Kabushiki Kaisha Drehzahlverringerungsvorrichtung und bremsaktuator mit einer solchen vorrichtung

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127772U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-03-26 1977-09-28
JPS5612837Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-03-31 1981-03-25
US4139442A (en) * 1977-09-13 1979-02-13 International Business Machines Corporation Reactive ion etching method for producing deep dielectric isolation in silicon
JP2666465B2 (ja) * 1989-04-21 1997-10-22 日本電気株式会社 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019217846A1 (de) 2018-11-21 2020-05-28 Toyota Jidosha Kabushiki Kaisha Drehzahlverringerungsvorrichtung und bremsaktuator mit einer solchen vorrichtung
DE102019217846B4 (de) 2018-11-21 2021-10-28 Toyota Jidosha Kabushiki Kaisha Drehzahlverringerungsvorrichtung und Bremsaktuator mit einer solchen Vorrichtung

Also Published As

Publication number Publication date
JPS5084176A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-07

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