JPS532152B2 - - Google Patents
Info
- Publication number
- JPS532152B2 JPS532152B2 JP6447073A JP6447073A JPS532152B2 JP S532152 B2 JPS532152 B2 JP S532152B2 JP 6447073 A JP6447073 A JP 6447073A JP 6447073 A JP6447073 A JP 6447073A JP S532152 B2 JPS532152 B2 JP S532152B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6447073A JPS532152B2 (de) | 1973-06-08 | 1973-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6447073A JPS532152B2 (de) | 1973-06-08 | 1973-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5013971A JPS5013971A (de) | 1975-02-13 |
| JPS532152B2 true JPS532152B2 (de) | 1978-01-25 |
Family
ID=13259134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6447073A Expired JPS532152B2 (de) | 1973-06-08 | 1973-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS532152B2 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4124994A (en) * | 1977-06-29 | 1978-11-14 | Mcquay-Perfex Inc. | Beverage cooling bath |
| GB1588855A (en) * | 1978-03-08 | 1981-04-29 | Mcquay Perfex Inc | Refrigerated beverage cooling baths |
| JP4888651B2 (ja) * | 2007-02-14 | 2012-02-29 | ニチアス株式会社 | 浄化気体供給装置 |
| JPWO2011125973A1 (ja) * | 2010-04-05 | 2013-07-11 | 株式会社ニコン | フィルタ保持装置、露光装置、及びデバイス製造方法 |
| KR20130032305A (ko) * | 2010-04-05 | 2013-04-01 | 가부시키가이샤 니콘 | 필터 박스, 노광 장치, 및 디바이스 제조 방법 |
| CN102844093A (zh) * | 2010-04-05 | 2012-12-26 | 株式会社尼康 | 过滤器装置、过滤器的收容方法、及曝光装置 |
| KR101201713B1 (ko) | 2011-12-20 | 2012-11-15 | 엘에스산전 주식회사 | 전자접촉기의 보조접점 기구 |
-
1973
- 1973-06-08 JP JP6447073A patent/JPS532152B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5013971A (de) | 1975-02-13 |