JPS5320950B2 - - Google Patents
Info
- Publication number
- JPS5320950B2 JPS5320950B2 JP6967972A JP6967972A JPS5320950B2 JP S5320950 B2 JPS5320950 B2 JP S5320950B2 JP 6967972 A JP6967972 A JP 6967972A JP 6967972 A JP6967972 A JP 6967972A JP S5320950 B2 JPS5320950 B2 JP S5320950B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6967972A JPS5320950B2 (en) | 1972-07-12 | 1972-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6967972A JPS5320950B2 (en) | 1972-07-12 | 1972-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928583A JPS4928583A (en) | 1974-03-14 |
| JPS5320950B2 true JPS5320950B2 (en) | 1978-06-29 |
Family
ID=13409771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6967972A Expired JPS5320950B2 (en) | 1972-07-12 | 1972-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5320950B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI424073B (en) * | 2007-09-11 | 2014-01-21 | Centrotherm Photovoltaics Ag | Method and apparatus for thermally converting metallic precursor layers into semiconductor layers, and also solar module |
-
1972
- 1972-07-12 JP JP6967972A patent/JPS5320950B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4928583A (en) | 1974-03-14 |