JPS5320855A - Diffusing apparatus - Google Patents
Diffusing apparatusInfo
- Publication number
- JPS5320855A JPS5320855A JP9483776A JP9483776A JPS5320855A JP S5320855 A JPS5320855 A JP S5320855A JP 9483776 A JP9483776 A JP 9483776A JP 9483776 A JP9483776 A JP 9483776A JP S5320855 A JPS5320855 A JP S5320855A
- Authority
- JP
- Japan
- Prior art keywords
- diffusing apparatus
- diffusing
- providing
- generating means
- evaporation rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To readily control the evaporation rate of diffusion source by providing a discharge generating means to a diffusing apparatus.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483776A JPS5320855A (en) | 1976-08-11 | 1976-08-11 | Diffusing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9483776A JPS5320855A (en) | 1976-08-11 | 1976-08-11 | Diffusing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320855A true JPS5320855A (en) | 1978-02-25 |
Family
ID=14121147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9483776A Pending JPS5320855A (en) | 1976-08-11 | 1976-08-11 | Diffusing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320855A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197824A (en) * | 1981-05-12 | 1982-12-04 | Siemens Ag | Method and device for filling impurity to semiconductor material |
-
1976
- 1976-08-11 JP JP9483776A patent/JPS5320855A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57197824A (en) * | 1981-05-12 | 1982-12-04 | Siemens Ag | Method and device for filling impurity to semiconductor material |
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