JPS5320855A - Diffusing apparatus - Google Patents

Diffusing apparatus

Info

Publication number
JPS5320855A
JPS5320855A JP9483776A JP9483776A JPS5320855A JP S5320855 A JPS5320855 A JP S5320855A JP 9483776 A JP9483776 A JP 9483776A JP 9483776 A JP9483776 A JP 9483776A JP S5320855 A JPS5320855 A JP S5320855A
Authority
JP
Japan
Prior art keywords
diffusing apparatus
diffusing
providing
generating means
evaporation rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9483776A
Other languages
Japanese (ja)
Inventor
Kazunari Kobayashi
Minoru Wada
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9483776A priority Critical patent/JPS5320855A/en
Publication of JPS5320855A publication Critical patent/JPS5320855A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To readily control the evaporation rate of diffusion source by providing a discharge generating means to a diffusing apparatus.
COPYRIGHT: (C)1978,JPO&Japio
JP9483776A 1976-08-11 1976-08-11 Diffusing apparatus Pending JPS5320855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9483776A JPS5320855A (en) 1976-08-11 1976-08-11 Diffusing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9483776A JPS5320855A (en) 1976-08-11 1976-08-11 Diffusing apparatus

Publications (1)

Publication Number Publication Date
JPS5320855A true JPS5320855A (en) 1978-02-25

Family

ID=14121147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9483776A Pending JPS5320855A (en) 1976-08-11 1976-08-11 Diffusing apparatus

Country Status (1)

Country Link
JP (1) JPS5320855A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197824A (en) * 1981-05-12 1982-12-04 Siemens Ag Method and device for filling impurity to semiconductor material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197824A (en) * 1981-05-12 1982-12-04 Siemens Ag Method and device for filling impurity to semiconductor material

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