JPS5320393B2 - - Google Patents
Info
- Publication number
- JPS5320393B2 JPS5320393B2 JP9075276A JP9075276A JPS5320393B2 JP S5320393 B2 JPS5320393 B2 JP S5320393B2 JP 9075276 A JP9075276 A JP 9075276A JP 9075276 A JP9075276 A JP 9075276A JP S5320393 B2 JPS5320393 B2 JP S5320393B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075276A JPS5316579A (en) | 1976-07-29 | 1976-07-29 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9075276A JPS5316579A (en) | 1976-07-29 | 1976-07-29 | Electron beam exposure apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5316579A JPS5316579A (en) | 1978-02-15 |
| JPS5320393B2 true JPS5320393B2 (cs) | 1978-06-26 |
Family
ID=14007326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9075276A Granted JPS5316579A (en) | 1976-07-29 | 1976-07-29 | Electron beam exposure apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5316579A (cs) |
-
1976
- 1976-07-29 JP JP9075276A patent/JPS5316579A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5316579A (en) | 1978-02-15 |